Definitely sanzang. She has lower damage due to not having Mana burst, but Illya decreases her attack and defense after NP. Still Illya comes with invincibility which means higher survivability and her RNG buff which is reliant to pairing her up with Kuro due to Kuro's or Ozy's skill that increases her buff success rate making it hard to team build, but honestly just sanzang as her skill just makes it such that Illya's NP effect which is increasing NP gain and Star generation be effective on the whole team with her third skill.
Sorry if that was confusing, but Tl;Dr Sanzang for utility and NP spamming Illya for survivability and Damage.
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